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SEMI D44 — Specification for Reference Position of Single Substrate for Handling Off On Tool
stacked chip on substrate (SCoS)
This Document does not address the transmission
electronic shelf labels
reporting of the collection events are process module-specific to support the reporting of process module-specific data parameters
E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0217 - Superseded SEMI D44 — Specification forThis Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards. This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components. The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications.
