G00600 - SEMI G6 - Test Method for Seal Ring Flatness Revision:SEMI G6-89 - Inactive Some of the elements and

Some of the elements and attributes in the schema file are exclusively for documenting SECS-II messages

SEMI MF1618-1110 (Reapproved 0322)

Execute triggered skill maintenance jobs

orgで入手可能となる。初版は2003年3月発行，前版は2008年11月に発行された。

本スタンダードは，global Micropatterning Committeeで技術的に承認されている。現版はglobal Audits and Reviews Subcommitteeで2006年5月16日に発行が承認された。2006年6月にwww

G00600 - SEMI G6 - Test Method for Seal Ring Flatness Revision:SEMI G6-89 - Inactive Some of the elements andNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification covers the method for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. This method will not work on parts smaller than 0. 330