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but not exclusively
SEMI C88-0815 (first published)
Available at www
To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI specification
1 This Standard provides a series of specifications for different grades of oxygen (O2) that are used in the semiconductor industry
D04400 - SEMI D44 - Specification for Reference Position of Single Substrate for Handing Off On Tool Revision:SEMI D44-0706E - Inactive but not exclusivelyThis standard was technically approved by the global Flat Panel Display Factory Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 16, 2006. It was available at www. semi. org in June 2006. E This standard was editorially modified in February 2007 to correct an error. Changes were made to 6. 2. 2. 4. This standard defines the datum line that specifies the position of the FPD manufacturing equipment,
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