M07100 - SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI StdPbc-1113 Forming an industry-consensus standard will

Forming an industry-consensus standard will minimize contamination

using a differential mobility analyzer (DMA)

after which raw silicon wafers are transferred to another carrier at device makers

SEMI G69-0996 (Reapproved 0318)

Application of this test method is expected to yield comparable data among POU purifiers and filters tested for the purposes of qualification for its installation

M07100 - SEMI M71 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI StdPbc-1113 Forming an industry-consensus standard will1 Purpose 1. 1 This Specification defines thin layer silicon on insulator (SOI) wafer requirements for CMOS large scale integrated circuit (LSI) devices. In the case of 200 and 300 mm wafers this Specification is targeted for nodes from 130 to 14 nm. In the case of 150 mm wafers, older LSI generations are included as well. By defining parameters, inspection procedures and acceptance criteria, both suppliers and customers may uniformly define product